Computer control of processes of an ion-beam etching via phase constraints variation method


The actual problem of effective control algorithm forming for nonlinear systems on the base of mathematical model of a beam formed of charged particles during process of ionic-plasma ion-beam etching is considered. To provide different conditions presented to the system and formalization of their description, the direct synthesis method based on use of phase constraints variation method and simple enough algebraic transformations is offered.


We'll glad to see your opinion about this work:
Pilishkin V. N.
Osikov A. M.

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